CHAPTER 4 pgINCIPLES OF X - RAY ENERGY - DISPERSIVE SPECTROMETRY IN THE ANALYTICAL ELECTRON MICROSCOPE

نویسنده

  • E. Fiori
چکیده

INSTRUMENTATION The EnergyDispr5jy Spectrometer The Solid state x-ray detector or energy-dispersive spectrometer (EDS) was 1°Ped in the late l960s and rapidly found use on electron-beam instruments rald er a!., 1968) because of its speed in collecting and simultaneously displaying da from a wide energy range. Its small size, but relatively large collection angle 123 Authors Copy

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تاریخ انتشار 2014